6630-01-291-7548 (PLASMA-PREP)
6630-01-291-7548 is equivalent to manufacture part number 11006. It is a planar plasma etcher and is classified under Federal Supply Class 6630 (6630 - Chemical Analysis Instruments), stocked for defense, aerospace, MRO, and industrial maintenance applications. This item is cataloged in the NATO supply system under 6630 - Chemical Analysis Instruments and is available through NSN-PARTS for U.S. government MRO, and commercial procurement.